Dynamic Characteristics of VCSELs for Cs-Based MEMS Atomic Clocks
نویسنده
چکیده
We have fabricated flip-chip-bondable vertical-cavity surface-emitting lasers (VCSELs) emitting at 894.6 nm wavelength for Cs-based atomic clock applications. For polarization control, we have integrated shallow semiconducting surface gratings in the top Bragg mirror. A modulation bandwidth of more than 5GHz is reached at only 0.5mA bias. Modulation current efficiency factors larger than 12GHz/ √ mA are achieved. The intrinsic modulation characteristics of the VCSELs are investigated by precisely fitting measured small-signal modulation response curves and relative intensity noise spectra. A K-factor of less than 0.40ns and a maximum 3dB bandwidth exceeding 22GHz are obtained.
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